Silicon Carbide Coated Graphite Trays
CVD silicon carbide (SiC) coatings have lots of advantages, including ultra-high purity surfaces and extremely high wear resistance. The CVD process can provide SiC coating with extremely high purity and theoretical density without pores. Moreover, since silicon carbide is very hard, it can be polished to a mirror-like surface. Because the coating products have excellent performance in high vacuum and high-temperature environments, Silicon Carbide Coated Graphite Trays are very suitable for the semiconductor industry and other ultra-clean environments. CVD silicon carbide coating has been applied in semiconductor industries already, such as MOCVD tray, RTP, and oxide etching chamber since silicon nitride has great thermal shock resistance and can withstand high energy plasma.
We also provide pyrolytic graphite (PG) products.
-CVD silicon carbide coating has been applied in semiconductor industries
–Silicon carbide is widely used in semiconductors and coating.
Packing of Silicon carbide
Our products are carefully handled to minimize damage during storage and transportation and to preserve the quality of our products in their original condition.
Available Ceramic products of Edgetech
Our advanced ceramics include Hot pressed Boron Nitride (HBN), Pyrolytic Boron Nitride (PBN), Silicon Nitride (Si3N4), Aluminum Nitride (AlN), Zirconia (ZrO2), Alumina (Al2O3), Lanthanum Hexaboride (LaB6), Cerium Boride (CeB6), Silicon Carbide (SiC), Boron Carbide (B4C), etc. Customized and complex ceramic parts are available on request.