Silicon Carbide Coated Graphite Trays
CVD silicon carbide (SiC) coatings have lots of advantages, including ultra-high purity surfaces and extremely high wear resistance. The CVD process can provide SiC coating with extremely high purity and theoretical density without pores. Moreover, since silicon carbide is very hard, it can be polished to a mirror-like surface. Because the coating products have excellent performance in high vacuum and high temperature environments, Silicon Carbide Coated Graphite Trays are very suitable for the semiconductor industry and another ultra-clean environment. CVD silicon carbide coating has been applied in semiconductor industries already, such as MOCVD tray, RTP and oxide etching chamber since silicon nitride has great thermal shock resistance and can withstand high energy plasma.
We also provide pyrolytic graphite (PG) products.
Silicon Carbide Coated Graphite Trays Applications
-CVD silicon carbide coating has been applied in semiconductor industries
–Silicon carbide is widely used in semiconductor and coating.
Packing of Silicon carbide
Our Silicon Carbide Coated Graphite Trays are carefully handled to minimize damage during storage and transportation and to preserve the quality of our products in their original condition.