Aluminum Nitride Electrostatic Chuck

Edgetech Industries, Advanced Ceramics Division supplies high-quality Aluminum nitride (AlN) Ceramics Electrostatic Chuck at competitive price.

Aluminum Nitride (AlN) Ceramics Electrostatic Chuck

In modern semiconductor manufacturing processes, wafers are processed in multiple steps and need to be transferred back and forth between hundreds of process equipment. A device is therefore needed to hold the wafer. The Electrostatic Chuck (ESC) uses a pressure plate with integrated electrodes. These electrodes are biased by high voltage to generate electrostatic holding force between the pressure plate and the wafer. The wafer is clamped and fixed through an Electrostatic Chuck. The adsorption force is uniform and stable, and the wafer will not warp. Deformation can ensure the processing accuracy and cleanliness of the wafer. Aluminum nitride (AlN) ceramics have high thermal conductivity and insulation properties, making them suitable for use as ESC materials. We offer custom aluminum nitride electrostatic chuck.

AlN Electrostatic Chuck 2

AlN Electrostatic Chuck

Edgetech Industries, Advanced Ceramics Division supplies high-quality Aluminum nitride (AlN) Ceramics Electrostatic Chuck at competitive prices.

Aluminum Nitride Ceramic Parameter

ItemUnitValue
ColorGrayish white, Beige
Water absorption%0
Volume Densityg/cm3≥3.30
Surface roughnessum0.2-0.85
Warpage(length ‰)≤2.5‰
Thermal conductivityW/m.k≥170
Thermal expansivityx 10-6/°C (20℃-800℃)4-6
Flexural strengthMPa≥350
Modulus of elasticityGPa310-320
Dielectric constant1MHZ, 25℃8.9
Dielectric lossx 10-44.6
Dielectric strengthKV/mm≥15
Volume resistivityΩ.cm≥1014

Typical characteristic

-Very high thermal conductivity

-High insulation capacity

-Low dielectric constant, effective against electronic signal interference

-Low thermal expansion

-Good metallization capacity

-Expansion coefficient can be matched with semiconductor silicon wafer

-Better mechanical strength than alumina

-Good corrosion resistance to molten metal

-Minimum impurity content, non-toxic, high purity

Application of AlN ceramic electrostatic chunk

Ceramic electrostatic chucks for the semiconductor industry

Packing

Our Aluminum Nitride Electrostatic Chuck is carefully handled to prevent damage during storage and transportation and to preserve the quality of our product in its original condition.

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