Silicon Carbide Ceramic Chuck
In the semiconductor production process, very thin wafers are often placed on silicon carbide ceramic chuck, connected to vacuum generators, and vacuum suction is used to fix the wafers, making it convenient for waxing, thinning, dewaxing, cleaning, and cutting the wafers.
SiC CHUCK
The suction cups are formed by isostatic pressing and high-temperature sintering. Silicon carbide ceramics have excellent mechanical properties, such as high strength and hardness, as well as excellent high-temperature stability, such as high thermal conductivity and low thermal expansion coefficient. They are often used as suction cups in precision machining, semiconductor manufacturing, optoelectronics industry, and other fields that require high precision and durability.
Edgetech can finish silicon carbide ceramic chunks and other customized ceramic products according to the requirements of the drawings and use sandblasting to create raised points to meet the requirements of use.
Silicon Carbide Ceramic Properties
| Item | Unit | SiC |
| Physical Property | ||
| Color | \ | Black |
| Density | g/cm3 | >3.14 |
| Mechanical properties | ||
| Bending strength (20℃) | MPa | 450 |
| Compressive strength (20℃) | MPa | 3900 |
| Elastic modulus (20℃) | GPa | 420 |
| Fracture toughness (20℃) | MPa m½ | 3.5 |
| Vickers hardness (HV0.5) | GPa | 24 |
| Thermal properties | ||
| Coefficient of thermal expansion (20℃-1000℃） | 10-6K-1 | 4.3 |
| Thermal conductivity | W/mK | 160 |
| Thermal shock stability | △T·℃ | 400 |
| Specific heat capacity | J/g·k | 0.67 |
| Maximum operating temperature (in air/Inert Atmosphere） | ℃ | 1700/1950 |
| Electrical properties | ||
| Volume resistance (20℃) | Ω·cm | 10^6-10^8 |
Performance Advantages of SiC Ceramics
-Precise size and thermal stability, flatness of 0.3-0.5μm
SiC Chuck
-Extremely high wear resistance and surface finish, small and evenly distributed pores, can evenly adsorb all areas of the wafer
-Good thermal conductivity, low expansion coefficient, and temperature uniformity
-Excellent acid and alkali corrosion resistance
-Good thermal conductivity to shorten the waxing and waxing process time, improve production rate, and increase production efficiency
-Small and evenly distributed pores, can evenly adsorb all tiny local areas of the whole wafer
Typical applications of silicon carbide ceramic chunk
-In semiconductor manufacturing, place extremely thin wafers on silicon carbide vacuum chucks, connect vacuum generators, and use vacuum suction to fix wafers.
-Applied to processes such as photolithography, etching, laser processing, and wafer inspection.
Packing of silicon carbide ceramic chunk
Our Silicon Carbide Chucks are carefully handled to minimize damage during storage and transportation and to preserve the quality of our products in their original condition.
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