Pyrolytic Boron Nitride Heaters

Diameter: 0.5” ~4”

SKU: PBN-H

Pyrolytic Boron Nitride Heaters, PBN/PG Heaters

The pyrolytic boron nitride heater uses high-purity and high-performance PBN as the substrate. Pyrolytic graphite (PG) is placed on the surface of PBN components by the CVD method as a conductor and heater. Depending on the usage requirements, the PG heating element could be covered by another layer of PBN or just stay open.

Both PG and PBN are extremely pure (99.99% or even higher) and very stable in a vacuum or inert atmosphere so the PBN-PG heating elements could be very durable. They could be heated to 1600℃ quickly without emitting any gas component, and the chamber is clean when using PBN/PG heaters. These heating elements are ideal products for the semiconductor industry and applications that require high temperature, high vacuum, and high purity.

PBN/PG heaters can operate at 1600°C or higher and have excellent thermal uniformity in ultra-high vacuum. As a non-brittle refractory material, its ultra-high purity is due to the high-temperature chemical vapor deposition production method, which makes it chemically inert to most corrosive gases and liquids and resistant to corrosion by most molten metals. It is mainly used in rapid annealing furnaces, sputtering coating equipment, electron microscope sample heating, MBE equipment, metal evaporation, and other equipment.

Specification

Diameter	0.5” ~4”
Power	150~3000W
Max. Working Temp.	1600 ℃

Performance of PBN/PG Composite Heating Element

Item		value	Unit
lattice constant		a:2.504×10-10 c:6.692×10-10	μ m
density		2.0-2.19	g/cm3
resistivity		3.11×1011	Ω·cm
tensile strength（ab）		153.86	N/mm2
bend strength	c	243.63	N/mm2
bend strength	ab	197.76	N/mm2
elastic modulus		235690	N/mm2
Thermo conductivity		“a” direction “c” direction
	(200℃)	60 2.60	W/m·k
	(900℃)	43.70 2.80	W/m·k
dielectric strength（at room temperature）		56	KV/mm

PBN Heater Advantages

-High purity (>99.995%) PBN
-PBN composite heating element has an operating temperature of up to 1600°C.
-High mechanical durability and dimensional stability.
-High thermal shock resistance.
-PBN layer provides electrical insulation.
-Eliminate outgassing and contaminations.
-Thermal gradients can be tailored.
-Chemically inert to almost all metals, liquids, and gas.
-It can be made into complex shapes

Packing

As a ceramic material, boron nitride is quite fragile in a lot of cases. Our Pyrolytic Boron Nitride Heaters are carefully handled to minimize damage during storage and transportation. Suitable outer boxes and inner cushioning materials are used for PBN products, vacuum packing is also engaged for some of the parts.